Foundations of MEMS
Type doc. :
Livre
Langue :
Anglais
Auteur(s) :
Editeur(s) :
Année d'édition :
2006
Thème :
Electronique
ISBN :
0131472860
Afficher le Résumé
The book explains the physical principles behind MEMS sensors and actuators, including electrostatic, thermal, piezoresistive, piezoelectric, and magnetic mechanisms. It also covers fabrication methods such as bulk and surface micromachining, silicon processing, and materials selection. Practical examples, design methodologies, and application case studies help readers understand how MEMS devices are designed, fabricated, and integrated into modern engineering systems. The text is suitable for undergraduate students, graduate students, and engineers working in microsystems technology.
| N° Bulletin | Date / Année de parution | Titre N° Spécial | Sommaire |
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| N° d'Exemplaire / inventaire | Cote | Localisation | Type de Support | Type de Prêt | Statut | Date de Restitution Prévue | Réservation |
|---|---|---|---|---|---|---|---|
| 207106A07 | 621.381 LIU 2 C1 | BIB-Centrale / Ouvrages | Papier | interne | disponible |
Liu, C. (2006). Foundations of MEMS . Pearson Prentice Hall;