Page de Garde

Principles of plasma discharges and materials processing

Type doc. :

Livre

Langue :

Anglais

Auteur(s) :

Lieberman, Michael A.
Lichtenberg, Allan J.

Edition :

Second édition

Editeur(s) :

J. Wiley-Interscience

Année d'édition :

2005

Sujet(s):
bohm criterion
surface modification

Thème :

Electrotechnique

ISBN :

9780471720010
Voir Plus

Afficher le Résumé

Principles of Plasma Discharges and Materials Processing provides a comprehensive treatment of the physical and chemical principles governing plasma discharges and their applications in materials processing. The book begins with the fundamental equations of plasma physics, including Maxwell’s equations, conservation laws, particle dynamics, diffusion and equilibrium properties. It then develops the theory of atomic and molecular collisions, plasma chemistry and plasma-surface interactions. A major part of the book deals with DC and RF plasma discharges, plasma sheaths, high-density plasma sources, glow discharges, pulsed-power systems and plasma diagnostics. The theoretical concepts are related to practical industrial processes such as etching, thin-film deposition, surface modification and ionized physical vapor deposition. The second edition also incorporates modern topics such as dusty plasmas and kinetic theory.

Voir le Sommaire

N° Bulletin Date / Année de parution Titre N° Spécial Sommaire
N° d'Exemplaire / inventaire Cote Localisation Type de Support Type de Prêt Statut Date de Restitution Prévue Réservation
221753A09 621.3 LIE 1 C1 BIB-Centrale / Ouvrages Papier interne disponible
Lieberman, M. & Lichtenberg, A. (2005). Principles of plasma discharges and materials processing (Second édition) . J. Wiley-Interscience;