Science and technology of microfabrication

Voir Plus Voir Moins

Afficher le Résumé

This volume presents the proceedings of the 1986 materials research society symposium on microfabrication, bringing together leading researchers from academia, industry, and government laboratories. the book examines the state of the art in microfabrication technologies that were driving advances in very-large-scale integration (vlsi), semiconductor manufacturing, optoelectronics, and emerging micromechanical devices. the central theme is that microfabrication had evolved from being merely a manufacturing tool into an independent scientific discipline. as device dimensions approached submicron scales, fabrication processes themselves became critical determinants of device performance, reliability, and yield. the proceedings therefore focus on both the fundamental science and the practical engineering of fabrication technologies. a major portion of the volume is devoted to advanced lithography, etching, thin-film processing, and pattern-transfer techniques. several contributions discuss the use of electron-beam, x-ray, and laser-based methods for fabricating increasingly smaller structures. excimer laser processing, high-resolution patterning, and novel materials-processing techniques are presented as promising approaches for future microelectronic manufacturing. another important topic is silicon micromachining and the use of silicon as a mechanical material. the volume includes pioneering work on silicon microstructures, micromachined sensors, accelerometers, fluidic devices, and other technologies that later became the foundation of mems (micro-electro-mechanical systems). the proceedings also address process integration, device fabrication challenges, materials characterization, and manufacturing issues associated with next-generation semiconductor technologies.

Voir le Sommaire