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An introduction to microelectromechanical systems engineering

Type doc. :

Livre

Langue :

Anglais

Auteur(s) :

Maluf, Nadim

Editeur(s) :

Artech House

Année d'édition :

2000

Sujet(s):
microsystems technology
silicon micromachining

Thème :

Electronique

ISBN :

0890065810
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A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

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N° Bulletin Date / Année de parution Titre N° Spécial Sommaire
N° d'Exemplaire / inventaire Cote Localisation Type de Support Type de Prêt Statut Date de Restitution Prévue Réservation
180948A02 621.381 MAL 5 C1 BIB-Centrale / Ouvrages Papier interne disponible
Maluf, N. (2000). An introduction to microelectromechanical systems engineering . Artech House;